rzp@   0@Pg3,___Bn캛Rp ͇Pl ͇>} ,p ,,HF>} .} ,p ,,} .} ,p ,,} .} ,p ,,} .f} ,p ,,pnf} .͇0} ,l ,,:80} .} ,p ,,} .͇$UQWЎ1_YN\ ͇RX ͇PT ͇LP ͇} ,\ ,,} .} ,\ ,,} .X} ,\ ,,b`X} ."} ,\ ,,,*X ,,20"} .} ,\ ,,X ,,} .͇} ,\ ,,P ,,} .͇} ,\ ,,T ,,} .J} ,T ,,TRJ} .} , } .͇} ,\$} .͊ #p͜ ͠ ͜l͛͜ ͠ ͜h͛͜ ͠ ͜d͛͜ ͠`͜.I``f ͠ ͭ͜\͚͜tP1͊"L ͇Ήø;t`f ͠" ͜ ͜"+Ͳ;͸`f ͠ " ͭ͜X͚͜t ͜ ͜"+Ͳ;͸뵛L L ͇ "T͜L ͛P͛͜Ͳ;͇`1͑L ,,͓͇͡`1͑L ,,͓&1͑XL ,,͓^X&͇1͑XL ,,͓^X&^ ^H ͇`1͑"H ,,͒.L ,,͓("&1͑H ,,͒L ,,͓&͇FH H F͇tF H ͙͇rWF H ͙͇wBT ^ ^H ͇Q`1͑H ,,͒L ,,͓&͇FH H F͇tF H ͙͇sF H ͙͇vD ͇T ^ ^H ͇Q1͑H ,,͒L ,,͓&D D ͇FH H F͇tF H ͙͇sF H ͙͇vD ͙͇t "  " ͜ ͜"+Ͳ;͸@ ͇`f ͠ ͭ͜L͚͜tL^^@ < ͇J ͜1͑< ,,͒L ,,͓͇͡F< < F͇tF< ͙͇sF< ͙͇v ͭ͜X͚͜tL^^@ < ͇J ͜1͑< ,,͒L ,,͓͇͡F< < F͇tF< ͙͇sF< ͙͇v` ͜ ͜"+Ͳ1͑@ ,,͒L ,,͓͇͡@ @ ͇4 "H͜;͸D͜;͸@͜; +Ήø "<͜;͸" +ΉøAϸ1ø ξ8͜;øى8+ΉϾ ͜ ͠ ͠ ͜ ͚͜t ͜4͚͜uu ͜ͳ͚u' ͜ ͳ͚t@ u1 ͜ى";Éȉøt@#t( ͭͦ͜,,8 ͇(8 ͙r@ ͇u&8 ͙øw@#͇u ͜ ͛͜ ͠ ͜;:8 ͙͇uL8 ͙t@8 ͙øt@ ͜ىøͲ؉˾0͚͜ىøt@#É ;@͇u~8+Σ,,4 ͇4 ,Û,͇4͜;4 ,Û,͇1 ͜"; ͜ ͜"+ͭ ͠/ ͬ͜0 ͇0 ͙͇w͸L 0 ͙͇r͸1͑0 ,,͓&d ͇1͑X0 ,,͓^X&h ͇1͑0 ,,͓ͭ͝ ͇͠1͑0 ,,͓͝ ͇͠X ^ ^H ͇b1͑>H ,,͓D>&͇1͑fH ,,͓lf&͇FH H F͇tF H ͙͇sF H ͙͇wnh ^ ^H ͇1͑"H ,,͒.0 ,,͓("&1͑>H ,,͓D>&͇1͑H ,,͒0 ,,͓&1͑fH ,,͓lf&͇1͑fH ,,͓lf&1͑H ,,͓&͇FH H F͇tF H ͙͇rF H ͙͇wT ^ ^H ͇l1͑H ,,͒0 ,,͓&1͑0H ,,͓60&͇FH H F͇tF H ͙͇rvF H ͙͇waø "M,͜$;͸"^ ^H ͇JH ,,ø͇(͜;H ,,øO͇(͜;FH H F͇tF H ͙͇sF H ͙͇vøϸM$͜$;J, ͇<( ͇, ,,"͇øϾ ͜;" ͜;͸, ,,"͇ø#Ͼ͜;"d ͙͇r͜ʛd ;͇͜;͸d ͙͇w͜ʛd ;͇͜;͸, ,,"͇ø/Ͼ ͜;͸, ,,"͇ø/Ͼ͜;͸, ,,"͇ø/Ͼ͜;͸, ,,"͇ø/Ͼ͜;͸( ,,"͇h ^ ^H ͇ø0Ͼ ͜1͑>H ,,͓D>&D&B,,øͱ;͇ø51͑>H ,,͓D>&ͻ͇ø;Ͼ͜1͑fH ,,͓lf&;͸͇FH H F͇tF H ͙͇rF H ͙͇wD ͇T ^ ^H ͇?1͑0H ,,͓60&D D ͇FH H F͇tF H ͙͇sF H ͙͇v, ,,"͇͸øϛD ͙͇t ͸øϛD ͙͇t ͜;͸D ͙͇u, ,,"͇øϾ͜;͸øϾ͜;͸øϾ͜;͸͜ ͠( ,,"͇øϛT ^ ^H ͇1͑0H ,,͓60&͙͇u.H ,B8 ͇,4 ͇8H ͙͇r8 8 ͇8H ͙͇t R4 ͇øϾ ͜8 ,,4 ,Û,ͱ;͇ø1͑0H ,,͓60&ͫͻ͸͇FH H F͇tF H ͙͇rF H ͙͇w "P ^ ^H ͇1͑H ,,͒0 ,,͓͝",,8 ͇8 ͙͇rEø1͑H ,,͒0 ,,͓͝;͸͇FH H F͇tF H ͙͇r7F H ͙͇w"zT ^ ^H ͇81͑JH ,,͓PJ&͇FH H F͇tF H ͙͇sF H ͙͇vJ^ ^H ͇81͑H ,,͓&͇FH H F͇tF H ͙͇sF H ͙͇v$ ͇X ^ ^H ͇1͑>H ,,͓D>& ͇ ͙͇uA21͑>H ,,͓D>&͙͇w1͑fH ,,͓lf&1͑1͑>H ,Û,͓D>&ƛ,,͓&  ͇$  $ ͇ 1͑>H ,,͓D>&͙͇tW1͑fH ,,͓lf&1͑ ͓&  ͇$  $ ͇1͑>H ,,͓D>&͙͇tW1͑fH ,,͓lf&1͑ ͓&  ͇$  $ ͇ ͇ ͇ ͇$͇ ͇s< P P P P PM& ͙r@ ͇u0  ͙øw@ ͙ىør@ É#͇uG1͑fH ,,͓lf&$62 ͇ $ $ ͇( ,,"͇H ,,øE͇͜1͑fH ,,͓lf&> ;͸͇FH H F͇tF H ͙͇rVF H ͙͇wA( ,,"͇øϛT ^ ^H ͇1͑JH ,,͓PJ&1͑0H ,,͓60& $ $ ͇1͑0H ,,͓60&͙͇r>øϾ͜1͑JH ,,͓PJ&;͸͇FH H F͇tF H ͙͇rF H ͙͇w ͇ ͇ ͇X ^ ^H ͇1͑>H ,,͓D>& ͇ ͙͇u ͇ ͇$͇ ͇s< P P P P PM&1͑fH ,,͓lf&$62  ͇FH H F͇tF H ͙͇rF H ͙͇w"D ͙͇t$ ͇` ͇D ͙͇r >$ ` ͇ø"` ͙͇up͜ʛ` &;͇` ͙͇tl͜; "øϾh͜;øϾd͜;øϾ`͜;øϸ "\͜; ͠ ͜ ͚͜t ͜ ͳ͚t@ ud ͙ør@#͇t ͜T͚͜t@ ͜X͚͜øt@ ud ͙ør@#͇tQø ϸ2;øNP@욛d ͇d ͙͇t*"D ͙͇uø ϸ2;ø ϾL͜; ͠ ͜ ͚͜t ͜ ͳ͚t@ t ͜X͚͜t@ t ͜T͚͜t@ u "GT ^ ^H ͇81͑0H ,,͓60&͇FH H F͇tF H ͙͇sF H ͙͇v"ø1"H͜; "D͜;"@͜; "<͜;"8͜; "4͜;ø͋P""øϸøϾ0͜;͸øϾ,͜;͸øϾ(͜;͸øϾ,͜;͸øϾ0͜;͸"͸øϾ$͜;͸øϾ ͜;͸øϾ͜;͸øϾ͜;͸øϾ͜;͸øϾ͜;͸øϾ ͜;͸øϾ͜;͸øϾ͜;͸øϾ͜;͸ "͸øϾ͜;͸øϾ͜;͸øϾ͜;͸øϾ͜;͸ø "L͜$;͸øϾ͜;øNϾ͜;͸^ ^DH ͇JH ,,ø͇͜;H ,,øM͇͜;FH H F͇tF H ͙͇sF H ͙͇vøϸL͜$;øϾ͜;øNϾ͜; "ø1о͜;ø1 ͠ ͜ ͚͜t"͋].UQWЎ@V1_YFXF\dždžV,FXF\F`F^V.ƒ,dždždždžƒ.s͇6:,:͇͙͇r ͇>.͇͙͇w ͇D>.:>vJ&ɛ͇͇^s1͔ ,,͖F & 1͔ ,,͖F &͇͇͇͋N>͇͙͇wJD60B6:64066ɛ͇-,>BBɛ͇vR&:>͇͙͇w ͇vR&:>͇͙͇w ͇zr:ɛb:jZR͇͙͇r ͇>.B͇͙͇w ͇͙͇r ͇vR&BJ͇:͙͇w:͇2͙͇r 2͇*vR&:>͇"vR&<b͇͙͇r ͇*vR&:.͇ ͙͇vvR&B.͇͙͇w ͇͙͇vvR&͇ ͙͇r  ͇B.B͇͙͇w ͇͙͇vSvR&͇ ͙͇r  ͇.BB͇͇t ͇vR&B.͇͙͇w ͇ ..͇ ͇|͇|͙͇w |͇.D:>ɛD|66:B>ɛx͇vR&:>͇͙͇w ͇͙͇r^s:DvR&x:1͔ ,,͖F &͇͋V6ƒ6V::]>UvV&͙͇sh͇hd͇vV&d͙͇wvV&d͇1͔͖ F&d:1͔͖ F& 1͔͖ F&d:1͔͖ F& `͇1͔͖ F&d:1͔͖ F&<d1͔͖ F& d1͔͖ F&<>ɛ\͇\`\`v&͇hvV&͙͇sX͇RvZ&͙͇s X͇XhvV&<:v& v&͇ZvV&vV&>T͇Tv& v&Tv & TTv&1͔bø͖hFb@1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@1͔bø͖hFb@ 1͔bø͖hFb@1͔bø͖hFb@1͔bø ͖hFb@`Dv^&H͇1͔b͖hFbͬ͝v^&͇1͔b͖hFbͬ͝vZ&͇1͔b͖hFbͬ͝vV&͇1͔b͖hFbͬ͝vR&͇1͔b͖hFbͬ͝vN&͇1͔b͖hFbͬ͝vJ&͇1͔b͖hFbͬ͝vF&͇1͔b͖hFbͬ͝vB&͇1͔b ͖hFbͬ͝P͇`>1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø͖hFb@ 1͔bø ͖hFb@`Hv^&DBH͇ٞٞD͇ٞ\1͔bن,,͖hFbͬ͝1͔خ,,͖ F&͇ن؆͇ٞtن؞͙͇sن؞͙͇wpvJ& vJ&͇b:]ʤJL͇<H͇4D͇J@͇8<͇͊͊I1<,,<,,"͇ ͜;͸ ͜;͸ ͜;͸͛͛͛͛͜͜͜;͸ ͜;͸͜;"͜;"͜;͸͜;"͜;"͜;͸͜;"͜;"͜;͸ ͜;͸ ͜;͸<,,"͇L@͇͛͜ ͠4@͇͊ՕL@͇͜ ͊͠Օ͜ ͠ ͜ ͊͠Օ͜ ͠ ͜ ͊͠`͜ ͠ ͜ ͊͠`͜ ͠ ͜ ͊͠`͜ ͠H@͇͊Օ ,,8͇8,,ø͇͊S ͬͫ͜4͇4͙w@ ͇t64͙r@ ͇u4͇"4ͻ͸͇64͙t@ ͇uL,,"͇ ͜;͸8@͇͜ ͊͠ՕL@͇͜ ͊͠Օ͜ ͠H@͇͊Օ͊S ͬͫ͜0͇0͙w@ ͇tD0͙r@ ͇u 0͇004͇L@͇"ͳ ͠ " ͜;͸͜ ͛͛͜͜ ͛͛͜͜ ͊͠Օ͜ ͊͠`|͜ ͊͠`x͜ ͛͜t͛͜ ͛͜p͛͜ ͊͠`4͜ ͊͠`l͜ ͊͠` ͜;͸ ͠4͙͇w 4͇,4͙͇r 4͇ +Σ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇<,,"͇ ͜;͸ ͜;͸4@͇h͜ ͊͠ՕL@͇d͜ ͊͠``͜ ͊͠`4@͇\͜ ͊͠ՕL@͇X͜ ͊͠ՕT͜ ͊͠`P͜ ͊͠`L͜ ͊͠`H͜ ͊͠`D͜ ͊͠`2@͇@͜ ͊͠Օ<͜ ͠H@͇͊Օ ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇͊S ͬͫ͜,͇,͙w@ ͇t,,͙r@ ͇u 6,͇1 ͜";t!6,͇",ͻ͸͇<,,"͇ ͜;͸ ͜;͸L@͇h ͇4͙͇t ͜ ͠D4͙͇t ͜ ͠04͙͇t ͜ ͠04͙͇r ͜ ͠ ͜ ͜"+Ͳ ͠8͜ ͛͜ ͠8@͇͊Օ4͜ ͠4@͇͊Օ0͜ ͠:@͇͊Օ,͜ ͠L@͇͊Օ(͜ ͊͠ՕH@͇$͜ ͠ ͜ ͊͠ՕL@͇ ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇͊H(͙r@ ͇u(͙øw@#͇t"͜ ͠4@͇͊Օ($͇1͑(,,͓ ͜ ͇͠<,,"͇ ͜;͸ ͜;͸L@͇͜ ͊͠Օ ,,8͇.8,,ø͇D,,"͇͜1͑$,,͓ ͛͛͜͜;$ͻ ͜;͸͇8,,ø͇͜ ͊͠Օ<,,"͇ ͜;͸͜;L,,"͇͜; "4͜1͑(,,͓ ͛͜Ͳ;͇L,,"͇͜; "  ͭ;͇L,,"͇ ͜;<,,"͇͜;͸ ͜  ͭ͛ ͛͜ ͇͠H@͇͊Օ ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇͊SL@͇ ͇͙͇ͬ͜tA ͇D,,"͇ ͭ;͸͇"<,,"͇ ͜;͸ ͜;͸L@͇ ͜ ͠4@͇͊Օ ,,8͇.8,,ø͇D,,"͇͜1͑$,,͓ ͛͜ ͛͜ ͭ͛ ͛͜;͸͇8,,ø͇ ͜ ͊͠Օ ͜ ͊͠ՕH@͇ ͜ ͊͠Օ ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇͊S ͇͙͇ͬ͜t9͇D,,"͇ͻ͸͇">͙͇s ͜ ͊͠Օ<,,"͇ ͜;͸ ͜;͸L@͇ ͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠Օ:@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠` ͜ ͊͠`<,,"͇ ͜;͸͜;@,,"͇ ͜; " ͜;@,,"͇ ͜.͛;<,,"͇͜;͸h ͇ ͜ ͠h ͙͇r:@͇ ͜ ͊͠Օh ͙͇t ͜ ͛͜ ͛͜ ͠ ͜ ͠H@͇ ͜ ͛͜ ͊͠Օ͊H ͜ ͚͜t@ ͜ ͚͜øt@ uh ͙ør@#͇u ͜ ͚͜t@ t ͜ ͚͜t@ t(͙t@ ͇uh ͙ør@#͇t}(͙͇u(1͑>h ,,͓D>&͇1͑h ,,͓&͇1͑h ,,͓Ơ͇ ,,,,1͑h ,,͓&͇1͑h ,,͓&͇D,,"͇ ͜;1͑>h ,,͓D>&ͻ ͜;͸͇h h ͇,h ͙͇vC.h h ͇s<Κdh ͙͇vz6h ͙͇r 6h ͇0͇h ͇@1͑f,,͓lf&00͇͇t͙͇s͙͇vh ͇1͑>,,͓D>&(͇͊G1͑,,͓&͇01͑f,,͓lf&<1͑͒,,͓ư͇1͑,,͓Ơ͇͇t͙͇r͙͇w͇ ͜͠d ͇d ͇<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠`| ͜ ͊͠`x ͜ ͠H@͇͊Օt ͜ ͊͠`p ͜ ͊͠` ,,8͇8,,ø͇ ͜;͸ ͜;͸ ͜;͸8,,ø͇H@͇͊S͇ ͜Ͳ ͠ ͜l ͚͜t@ t ͜h ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͜d ͚͜t@ t ͜` ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͜\ ͚͜t@ t ͜X ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͬ͜ɛ͇͙͇r͇ ͇W<,,"͇ ͜;͸ ͜;͸L@͇T ͛͜ ͠4@͇͊ՕL@͇͇04͙͇t`P ͜ ͊͠ՕL ͜ ͊͠`H ͜ ͊͠`D ͜ ͊͠`@ ͜ ͊͠`< ͜ ͊͠`8 ͜ ͊͠Օ4 ͜ ͊͠`0 ͜ ͊͠`, ͜ ͊͠`͙͇r<,,"͇ ͜;͸ ͜;͸ ,,8͇.8,,ø͇<,,"͇( ͜ ͛4͛͜;͸͇"$ ͜ ͠:@͇͊Օ ͜ ͊͠` ͜ ͊͠`͙͇t  ͜ ͠  ͜ ͠ ͜ ͛ ͛͜ ͛͜ ͇͠ЛH@͇͊Օ͊S͇ ͜Ͳ ͠ ͜l ͚͜t@ t ͜h ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͜d ͚͜t@ t ͜` ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͜\ ͚͜t@ t ͜X ͚͜t@ u(͇ ͜ ͜"+ͭ ͠ ͬ͜ɛ͇͙t@ ͇u͙øt@#͇u ͇͙t@͙ør@#͇t͙t@͙øt@#͇u" ͜ ͠<@͇͊Օ͙͇u ͜;͸<,,"͇ ͜;͸H@͇1͑,,͓ ͇<,,"͇ ͜;͸H@͇h ͇͙͇t  ͜ ͠  ͜ ͠ ͜1͑1͑>,Û,͓D>&ƛ,,͓ ͛͜ ͛͜ ͛͜ ͇͊͠`͊S ͬ͜0͇1 ͜";øt@ u͙øt@#͇u 0͇1 ͜";øt@ u͙ør@#͇u 0͇0͙͇u ͜;͸"0ͻ͸͇"01͑,,͒,,͓ư͇͇t͙͇r/͙͇w0͇h ͇Q1͑,,͒,,͓ư00͇͇t͙͇s͙͇w|0͙͇t" ͜ ͠<@͇͊Օ<,,"͇ ͜;͸H@͇h ͇01͑,,͒,,͓ư<1͑,,͒,,͓ư͇͇t͙͇r^͙͇wH0͇h ͇v1͑,,͒,,͓ư1͑,,͓& 00͇͇t͙͇rj͙͇wT ͜ ͠ ͜0 ͭ͛͛͜ ͇͠L@͇͊Օ ͜ ͛ ͛͜0 ͭ͛ ͛͜ ͇͠H@͇͊Օ͊S ͇͙͇ͬ͜t.01͑r,,͓x͇+1͑r,,͓x͇͙͇t)"0 ͭ;͸͇L@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠` ͜ ͠H@͇͊Օ͊S ͜1͑<,,͓B͇͠1 ͜";u ͜;͸G ͜1͑<,,͓B͇͠" ͜;͸"04͙͇u[͇6͙͇v.͇͙͇u͇͇?1͑,,͓ ͇͇t͙͇s͙͇v>͇͇͇͇1͑,,͓ ͇>0͇00,,,,͙͇u ͇͇t͙͇r_͙͇wI͙r@ ͇uj<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠`H@͇ ͜ ͊͠Օ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S<,,"͇ ͜;͸L@͇ ͜ ͠4@͇͊ՕL@͇ ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠`͇͇?1͑,,͓ ͇͇t͙͇s͙͇v ͜ ͠:@͇͊`͇j ͛͜ ͛ ͛͜1͑,,͓  ͛ ͛͜ ͇͊͠`͇t͙͇rv͙͇w`| ͜ ͊͠`x ͜ ͛t ͛͜ ͇͊͠`p ͜ ͠L@͇͊`l ͜ ͊͠`h ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͬ͜0͇0͙͇u0͇ ͜;͸)͇"ͻ͸͇"͙͇r d ͜ ͙͇͠r<@͇͊Օ` ͜ ͛\ ͛͜ ͇͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͬ͜0͇0͙͇u0͇ ͜;͸+͇"ͻ͸͇"͙͇r d ͜ ͙͇͠r<@͇͊Օ͙͇w$0͇͇0͇͙͇t X ͜ ͙͇͠t<@͇͊Օ͙t@͙øt@#͇u ͇<,,"͇ ͜;͸ ͜;͸L@͇04͙͇uT ͛͜ ͠4@͇͊ՕL@͇P ͜ ͊͠ՕL ͜ ͊͠`H ͜ ͊͠`D ͜ ͊͠`<,,"͇ ͜;͸H@͇@ ͜ ͊͠Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͜X͚͜t@ t ͜T͚͜t@ t} 8} 8} 8V} 8>} 6} 6} 6} 6f} 6r} 8<} 8} 8} 8} 84͜ ͠< ͜<,,"͇ ͜;͸ ͜;͸L@͇8 ͛͜ ͠4@͇͊ՕL@͇4 ͜ ͊͠Օ0 ͜ ͊͠`, ͜ ͊͠`( ͜ ͊͠`$ ͜ ͊͠` ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H͇͊S ͇͙͇ͬ͜t!͇"ͻ͸͇<,,"͇ ͜;͸ ͜;͸L@͇ ͜ ͠4͙t@ ͇t64͙t@ ͇u  ͜ ͠ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͛͜ ͛͜ ͊͠` ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S͇ ͜ ͚͜t@ t ͜ ͚͜t@ t ͜ ͛͜ ͛͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͇͙͇ͬ͜t- ͇ͬ͜"ͻ͸͇"<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇͇͇͇͇͇ ͜ ͊͠ՕD@͇ ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠` ͜ ͊͠`L@͇ ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͜ ͚͜t@ t ͜ ͚͜t@ t ͜ ͚͜t@ t<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͇ͬ͜"ͻ͸͇<,,"͇ ͜;͸ ͜;͸L@͇  ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠` ͜ ͠H@͇͊Օ͊S͇ ͜T͚͜t@ t ͜X͚͜t@ u ͇ ͜ ͚͜t@ t ͜ ͚͜t@ u D͇"͙͇t ͜;͸ ͜;͸ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇ ͜ ͠H@͇͊Օ͊S͇ ͜T͚͜t@ t ͜X͚͜t@ u ͇ ͜ ͚͜t@ t ͜ ͚͜t@ u D͇"͙͇t ͜;͸ ͜;͸ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇ ͜ ͠H@͇͊Օ͊S͇ ͜T͚͜t@ t ͜X͚͜t@ u ͇ ͜ ͚͜t@ t ͜ ͚͜t@ u D͇"͙͇t ͜;͸ ͜;͸ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͇͙͇ͬ͜t)͇"ͻ͸͇"YΣ,,͙w@ ͇t͙r@ ͇u04͙͇t<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͠4@͇͊ՕL@͇ ͜ ͊͠Օ| ͜ ͊͠`x ͜ ͊͠Օt ͜ ͊͠`p ͜ ͊͠`l ͜ ͊͠`4͜ ͊͠`͇͇h ͇n1͑,,͓Ơ͙͇r61͑,,͓Ơ ͭ ͇͠ h ͜ ͠1͑,,͓Ơ͙͇r?1͑,,͓Ơ͇͇d ͜1͑1͑>,Û,͓D>&ƛ,,͓ ͛͜` ͛͜ ͛͜\ ͛͜ ͇͠:@͇͊`͇t͙͇rr͙͇w\͙͇r>͇ 6͇X ͜ ͭ͛T ͛͜ ͇͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͙͇ͬ͜w ͇ͬ͜ ͇04͙͇u<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇P ͜ ͠4@͇͊ՕL@͇L ͜ ͊͠ՕH ͜ ͊͠`D ͜ ͊͠Օ@ ͜ ͊͠`< ͜ ͊͠`8 ͜ ͠2@͇͊`4 ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͇͙͇ͬ͜t! ͇"ͻ͸͇ ͜0 ͚͜u@ u ͜, ͚͜øu@#tj<,,"͇ ͜;͸ ͜;͸L@͇( ͛͜ ͠4@͇͊ՕL@͇h ͇$ ͜1͑1͑>,Û,͓D>&ƛ,,͓ ͛͜ ͛͜ ͇͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͬ͜1͑ ,,͓&`͇1͑ ,,͓&`͙͇t_ 1͑ ,,͓&`͇"1͑ ,,͓&`ͻ͸͇͇t͙͇r>͙͇w(͇<,,"͇ ͜;͸ ͜;͸L@͇ ͛͜ ͠4@͇͊ՕL@͇ ͜ ͠4@͇͊ՕL@͇L@͇ ͜ ͊͠Օ ͜ ͊͠` ͜ ͊͠` ͜ ͠H@͇͊Օ ,,8͇<,,"͇ ͜;͸ ͜;͸8,,ø͇H@͇͊S ͇͙͇ͬ͜t D͇ ͠ ͜ ͚͜u<,,"͇ ͜;͸" ͛͜ ͊͠`<,,"͇ ͜;͸"04͙͇r ͜ ͠4@͇͊`04͙͇r!<,,"͇ ͜;͸H@͇ ͜1͑$,,͓ ͛͜ ͛͜$,,,, ͛ ͇͠ ͜ ͛͜ ͭ͛ ͇͊͠` ͜ ͛ ͛͜ ͇͊͠`<,,"͇ ͜;͸͇Q ͜ ͛ ͛͜1͑<,,͓B͛͜ ͛͜1͑,,͓  ͛ ͇͠ ͜ ͛͜ ͊͠`@,,"͇ +Ήø6Ͼ ͜1͑r,,͓x;͇͜;͸h ͇1͑,,͒,,͓ư͙͇u ͜1͑1͑>,Û,͓D>&ƛ,,͓ ͛͜` ͛͜1͑,,͒,,͓ưͫ ͛ ͛͜ ͇͊͠`͇t͙͇r͙͇w͇t͙͇r͙͇wy͙͇t͇?1͑,,͓ ͇͇t͙͇s͙͇v ͜ ͛ ͛͜ ͛ ͛͜ ͇͊͠`<,,"͇ ͜;͸"04͙t@ ͇u`͙͇r ͭ ͇͠  ͭ ͛͜ ͇͠ ͜ ͛͜ ͛͜ ͠04͙͇t' ͜ ͛͜ ͛\ ͛͜ ͇͠04͙u@ ͇ud͙øt@#͇u6 ͜ ͛ ͛͜ ͭ͛\ ͛͜ ͇͠0 ͜ ͠h ͇1͑ ,,͓&`͙͇r ͜1͑ ,,͓&`ͫ ͛ ͛͜1͑1͑>,Û,͓D>&ƛ,,͓ ͛͜ ͛͜ ͇͇͠t͙͇r͙͇w͊`<,,"͇ ͜;͸"4͙t@ ͇t64͙t@ ͇u ͜ ͠D4͙t@ ͇t,4͙t@ ͇u ͜ ͠04͙͇t ͜ ͠ ͜ ͛͜ ͛ ͛͜ ͛ ͛͜ ͇͊͠` ͜.`  ͭ͛ ͛͜ ͇͠` ͙͇u͊` ͜ ͛ ͛͜ ͛ ͛͜ ͇͊͠`͙͇t ͜ ͠ | ͜ ͙͇͠t ͜| ͠ x ͜| ͙͇͠t ͜x ͠ t ͜x ͠ ͜ ͚͜t@ u| ͜ ͚͜øt@#ux ͜ ͚͜øt@#u p ͜ ͠l ͜ ͛͜| ͛͜x ͛͜ ͊͠`<,,"͇ ͜;͸"h ͜; ͠ ͜ ͚͜t꾬 ͜4͚͜u@ u ͜ø ͳ͚øu@#txd ͜.O`삛&͇,,,0͇~0͙͇r ͇ ͇`` ͜ͺ`\ ͜ͺ`X ͜ʛ$` ͺ͇`T ͜ͺ`P ͜ʛ4ͺ͇`L ͜ͺ`H ͜ʛͺ͇`D ͜ͺ`@ ͜ʛ͇d͙͇t`4͜ͺh ͇?`1͑ ,,͓&`ͫͽ͇͇t͙͇s͙͇v`4͜ͺ`< ͜ͺ`8 ͜ʛ,ͺ͇`4 ͜ͺ`0 ͜1͑>͓D>&1͓͑&ͺ͇`, ͜1͑>͓D>&1͓͑&ͺ͇`( ͜1͑>͓D>&1͓͑&ͺ͇`$ ͜1͑>͓D>&1͓͑&ͺ͇` ͜ͺ` ͜ͺ ͜ ͠0͇\` ͜ʛ1͑<,,͓B͜1͑,,͓ 1͑r,,͓x1͑,,͓͒ư1͑,,͓͒ư1͑,,͓͒ư1͑,,͓͒ưͺ͇͇t͙͇r͙͇wn} 8} 8} 8V} 8>} 6} 6} 6} 6f} 6r} 8<} 8} 8} 8} 84͜ ͠ ͜&͇,,,0͇~0͙͇wz ͜`&͇|͇1͇͇t͙͇s͙͇v2<,,"͇ ͜;@,,"͇ ͜ ͜"z͛;<,,"͇͜;͸͋<,,"͇ ͜;͸ ͜;@,,"͇ ͜ ͜"z͛;<,,"͇͜;͸͋ +Σ,,8͇ ͜"LΣ,,͇8,,,Û,ϸ1ø ͇D,,"͇ ͜ ͠8,,,Û,͇ ͠ ͜ ͚͜tȾ ͜ͳ͚uŦ ͜ ͳ͚u1 ͜øͭ؉ͦ;u= ͦ͜;u* ͜; ͜ ͛͜ ͇͠N ͜"+Σ,,͇͙͇w ͇44͜;.͇,Û,͇4͜; ͜,,ͭ ͇͠1 ͜";t ͜;͸1"͋ ͠ ͜ ͚͜u͜M4͜$͛͛͜ ͠ ͜M͜$͛ ͛͜ ͠O(͜$ ͠ ͜M͜$͛ ͛͜ ͠ ͜M͜$͛ ͛͜ ͠ ͜t ͠H͇Xt ͜D&B,,øͱ1͑,,͓ ͇͇͠t͙͇s͙͇wu͋&͇x,,,0͇x ø0,ىÛ,#É ͇ RP<,,"͇͋͊S ͜"; ͜ ͠͸͊Օ1 ͜";øt@ uh ͙ør@#͇u (͇1 ͜";t ͜ ͠ ͜ ͚͜t@ t ͜ ͚͜t@ tV1 ͜";t ͜ ͠ ͜";t4͜ ͛͜ ͠ ͦ͜,,͇t͙͇r.͇ ͜Ͳͦ,,͇t͙͇r.͇H͇1͑,,͓ ͦ͜,,|͇t|͙͇r.||͇|͙͇tp1͑,,͓ ͜Ͳͦ,,x͇tx͙͇r.xx͇x͙͇uE͇t͙͇r͙͇w͙͇w(͇# ͜ ͊͠Օ ͜ ͊͠Օ͜.R`X`>} @} @ } @ } @ } @} @ } @} @} @`D(H͇ͬ͜t͇ͬ͜ ͇͇ͬͬ͜͜ ͇ͬ͜ɛ͇͇ͬ͋͜2|xttdt &  )   ,   /  2  5   8:;?@ AB \\  ?2qGHIJKLM QZJbJJ@_~ 1G 4TTKR'=yC9D2DvF  * 7DLc r $8IKcgwy    <1E5c>< - 7 O o p $q : : : ;C @~ 8   ( 9 < "? a Ah H C F4 .z =   2 3L J  2 ,?@/ABpAC16$gC@7"AY89; *F=p$;")>DgE#+4r.@C>@?~'%&")H'q@ ,+-/M?k;<D!GeEBBQAAABVAECa|/9<:'ael*/+2PW \BeB+ ;;X::299@ioT?Q?{Gz??Q?~٭e?Aȓk?333333?J4?333333?V-?K=U?p= ף?@ffffff@-C6 ?y&1|?? 0*X?z6>?Է鲘?iW?8m4?tV? 'NL2dE };50?#OM:/A  P$\ 8v Input new atomic symbol : ****** That is not a correct symbol. Please reenter. ******Please use only 1 or 2 letters HHeLiBe B C N O FNeNaMgAlSi P SClAr KCaScTi VCrMnFeCoNiCuZnGaGeAsSeBrKrRbSr YZrNbMoTcRuRhPdAgCdInSnSbTe IXeCsBaLaCePrNdPmSmEuGdTbDyHoErTmYbLuHfTa WReOsIrPtAuHgTlPbBiPoAtRnFrRaAcThPa Uȹ̻ɺ INPUT.BASTRIM.EXE ## \ \######.^^^^ ##.###^^^^ #.#### #.#### #.#### #.####Numb.Description (A) (g/cm3) Stoich Stoich Stoich StoichLayerLayer Width Density Atom 1 Atom 2 Atom 3 Atom 4 Atom 4 = ## ###.##### Atom 3 = ## ###.##### Atom 2 = ## ###.##### Atom 1 = ## ###.#####Target Elements: Z Mass (amu) # #######.^^^^ #######.^^^^PlotType (0-5); Plot Depths: Xmin, Xmax(A) [=0 for Viewing Full Target] ######.## #####.### ####.###Target Energies (eV): Displacement, Binding, Surface, (Optional Individual Disp. E.) ## ## ## Data Diskfiles (0=no,1=yes): Backscattered Ions, Transmitted Ions, Sputtered Atoms ## ############## Cascades(1=No; 2=Full; 3=Sputt.; 4,5= Neutrons), Random Number Seed ## ####.## ########.# ##.# ###### ###.## ######Ion: Z1, M1, Energy (keV), Angle, Number,Bragg Corr,AutoSave Number. Input Data File for TRIM TRIM.IN Press SPACEBAR or ENTER to store on disk; Any other key to Redo.Disk Data Files = NONE SPUTTER.TXT TRANSMIT.TXT BACKSCAT.TXT degrees , Angle of Incidence =Random Seed = Bragg Correction for Compound = Ions.; AutoSave at; Total Ions= Calc. of Ion SPUTTERINGFull Cascade CalculationQuick Calc. of Range/Damage);eV (Disp. Energy= eV,Binding Energy=Displacement Energy=, Lattice Energy=, Surface Binding Energy= meV Angstroms ----- ------ Display Window Depths : % #.####^^^^ A , Density = , Depth = - keVIon Energy =, Mass =, Atomic number =Ion = >>>>>>>> Neutron/Electron Damage Calculation <<<<<<<< You may switch between these during the calculation. < 5 = NO Graphics (Fastest Calc., or running TRIM in background). 4 = All FOUR of the above on one screen. 3 = Transverse Plot of Ions + Recoil Cascades, YZ-Plane. 2 = Recoil Distribution only (No Ions) projected on Y-Plane. 1 = Ion Distribution with Recoils projected on Z-Plane. 0 = Ion Distribution with Recoils projected on Y-Plane. Five different types of TRIM Monte Carlo PLOTS are available : the Y and Z Directions are Parallel to the Target Surface. The Plot coordinates assume the X-Direction is Depth, while Type of PLOTS ͻ ( Press any key ) to its cascade. recoil event so that you can relate each It is recommended that you turn ON the Collision File in TRIM This is the default. You must correctly specify your target. is H at 100 keV. ion Complete this program assuming your Which type of Damage do you want ? [1] Do you want: (1) Quick Kinchin-Pease Damage or (2) Full Cascades. Neutron/Electron Calculations require file : RECOILS.DATWhich type of calculation do you want ? [1] 4 = Calculation of Neutron/Electron Cascades. 3 = Calculation of Surface Sputtering. 2 = Detailed Calculation with full Damage Cascades. 1 = Ion Distribution and Quick Calculation of Damage.Four different types of TRIM Monte Carlo calculations are available :--- Type of Calculation --- [ For Beginners, try going through this program only pressing ENTER. ] [ For all questions, a default value is supplied in square parenthesis.] [ To restart program at beginning, press ESC key . ] Input File for TRIMSCOEF.88HICOEF.DAT( Press Any Key ) COMPOUND.DAT. Instructions are at the top of the file. This table may be rearranged, or added to. Edit the file Ŀ ͼ Ref: J.F.Ziegler and J. Manoyan, Nucl. Inst. Meth., B35, 215 (1988) ͹ COMMON TARGET MATERIALS LIQUIDS AND GASES ION IMPLANTATION MATERIALS STEELS AND METAL ALLOYS NUCLEAR PHYSICS MATERIALS SOLID PLASTICS AND POLYMERS and chemical formulation. The compounds are grouped as follows : The following tables list over 100 compounds, typical densities, ͻ TABLE OF COMMON COMPOUNDS Restart TABLE ESC - This Target (Item Number) - Next Page SPACEBAR - Should Bonding Corrections be applied to Stopping ? (Y)Input a NEW DENSITY (g/cm3) = YyIs target DENSITY all right (Y) ? ͼ ͹ ͹ ͻ No Bragg Calculation Bragg Correction at Stopping Peak = +##.## % 28.79532.7355.43145.44585.85936.14516.436.727.106.810.008.13151.61744.844421.2915.79620.383.712610.98813.9266.16785.080215.0229.78973.93848.75818.24367.24429.59(H-H)(H-C)(H-N)(H-O)(C-C)(C=C)(CC)(C-N)(C-O)(C=O)(C-F)(C-Cl)(NN)(N-O)(O=O)(S-H)(S-C)(S-F) Bond Type Number StoppingTARGET BONDS (per molecule)No Bonding Corrections will be made to Stopping###.### Name Numb Abundance StoppingAtom Atom Relative Core ---- TARGET COMPOSITION -----#.###### g/cm3###.####Density = Target = K Color indicates Bonding Corrections.ٳ Item Number : Ŀ*- !#COMPOUND.DATTa WReOsIrPtAuHgTlPbBiPoAtRnFrRaAcThPa UInSnSbTe IXeCsBaLaCePrNdPmSmEuGdTbDyHoErTmYbLuHfMnFeCoNiCuZnGaGeAsSeBrKrRbSr YZrNbMoTcRuRhPdAgCd HHeLiBe B C N O FNeNaMgAlSi P SClAr KCaScTi VCrvBMp{*5X .9tJUxlm'"'k'r'6+T+r+7,|,-.484Q5q5==J?f??????@@@AAAAAB%B5B0CLC\CxCCCCCCCDD}DEF3FOF_FFFGGGyHI JJKKKLLL MM)MEMUMeMuMVNNN Q'RSSSSS TTTVVVVVVVVVVWWWW XlXrXdZ[[]`H`N`a a0aLaRaCd_doddddddddPeeeeeeefffFggggghkhiBiiNjjwkkkkklellllllllllmmm$m/mmmmmmnnnhooooo3ppqqqr#r3rCrSr{rrssss5ttttt uu6v