ÉÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍ» º Saved DATA File for TRIM º º Changes will Modify Continued TRIM Calculations º ÈÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍͼ TRIM Version Number = Version - 92.12 ION DATA:At.Numb, Mass(amu), Energy (keV) , Angle to Target 2 4.0000 20.0000E+02 0.0 ION NUMB: Current, Total, AutoSave, Transmitted, Backscattered 4762 99999 500 4761 0 CURRENT ION: Energy(eV), Depth (X,Y,Z), Trajectory: Cos(X,Y,Z), Sin(X) 17.92431E+05 89.74343E+02 -6.35161E+00 -1.28066E+02 0.999604 0.007983 -0.027002 0.028157 ION AVGS: Range, Straggling, Vacancies/Ion 0.0000E+00 0.0000E+00 2.6533E+00 ION SUMS: Range,Straggling,(Vacancies,Replacements,Interstitials)/Ang. 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 12.63281E+01 0.00000E+00 0.00000E+00 Ion Y-Z Lateral Data : Range, Straggling, Kurtosis, Radial Dev. 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 0.00000E+00 67.44230E+02 TGT DATA: ÍÍÍÍÍÍ Numb.Elements, Numb.Layers ÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍÍ 4 3 TGT DATA: Atomic Numb, Mass , Disp. Energy(eV) 14 28.0860 20.00 14 28.0860 20.00 14 28.0860 20.00 0 0.0000 20.00 TGT Layers: Name Width(A), Depth(A), Density(g/cm3), Stoichiometry (Tgt.Atoms 1-4) "3000" 30.0000E+02 30.0000E+02 2.3210E+00 1.00000 0.00000 0.00000 0.00000 "s2" 30.0000E+02 60.0000E+02 2.3210E+00 1.00000 0.00000 0.00000 0.00000 "s3" 40.0000E+02 10.0000E+03 2.3210E+00 1.00000 0.00000 0.00000 0.00000 Displacement E, Final E, Binding E, Surf. Binding E, Ed(min) (eV) 20.00 4.0 2.00 0.00 20.00 Total Sputtered Atoms and Energy (eV) (Target Atoms 1 - 4) 0.000E+00 0.000E+00 0.000E+00 0.000E+00 0.000E+00 0.000E+00 0.000E+00 0.000E+00 Plot Display Start Depth (A), End Depth(A), Depth Resolution (Ang.) 0.00000E+00 10.00000E+03 10.00000E+01 Cascades (1=Full,2=KP,3=Sputt,3=Neut+KP,4=Neut+Full),Disk FLAGS:Backscatter,Transmit, Sputter, Seed 1 0 0 0 1521947908 Plotting Colors from TRIM.PRO 12 15 6 10 12 15 7 15 14 12 10 11 3 2 1 5 11 10 9 13 PlotType, Plot Positions 0 232 637 438 637 16 332 178 332 232 637 16 332 438 637 16 170 232 431 178 332 438 637 178 332