****************************** * NEDQNT * * EDS DATA ANALYSIS PROGRAM * * 8706100020-NJZ * * Modified for the * * Mac by JFM * * with Language Systems * * MPW FORTRAN * * Remember CAPS LOCK and all * * elements & lines need 2 * * letters & numbers need * * the decimal point * * Toolbox Version in the * * Works! * ****************************** Data Analysis on: 25-JUL-89 at 18:01:21 PAUSE Note above and hit return to continue Which Detector did you use (High or Low) [L] Si(Li) Detector/Microscope Parameters ________________________________________ Parylene thickness(cm) = 1.0000E-05 Aluminium thickness(cm) = 0.0000E+00 Beryllium thickness(cm) = 0.0000E+00 Gold thickness(cm) = 1.5000E-06 Silicon Dead layer(cm) = 2.0000E-05 Silicon Act. layer(cm) = 2.0000E-01 X-ray Incid. Angle(deg) = 0.0000 Detector Azimuth (deg) = 90.0000 Detector Elevation(deg) = 0.0000 Detector Solid Angle(Sr) = 0.0430 FWHM of Mn K-alpha (eV) = 171.0000 Constant for Mn K-alpha = 4.3000 Incomplete Charge Const A= 0.0000 Incomplete Charge Const B= 0.0000 Enter Analysis/Specimen Identification : TEST FOR COMPARISON WITH TFA ------------------------------ SELECT Type of Calculation ------------------------------ COMPOSITION from Intensity=C INTENSITY from Composition=I Enter your Choice [C] = Accelerating Voltage (kV)? : 200 Number of Elements to be Analyzed ? : 2 Enter Element,Line,Intensity of Peak Number 1 -[A2,A2,REAL] NI,K ,50000. NI K 50000.000 Enter Element,Line,Intensity of Peak Number 2 -[A2,A2,REAL] CU,K ,50000. CU K 50000.000 Int Wt% At% Wt%-Ratio At%-Ratio -------------------------------------------------------- NI K 5.000E+04 47.64 49.62 1.0000 1.0000 CU K 5.000E+04 52.36 50.38 1.0989 1.0154 Analysis by Thin Film Approximation -------------------------------------------------------- Absorption Correction? [Y] Y Enter Specimen Thickness (nm) along Beam Direction : 1000 Enter Specimen Tilt: X-Axis, Y-Axis [ZZ,ZZ] : 35,0 Enter Specimen Density (Calculate by Averaging = 0.): Intensity Wt% At% Wt%-Ratio At%-Ratio -------------------------------------------------------- NI K --------------47.82 49.80 1.0000 1.0000 CU K --------------52.18 50.20 1.0911 1.0082 Analysis with Absorption Correction -------------------------------------------------------- Electron Incidence Angle = 55.00 Thickness (nm) = 1000.00 Abs. Pathlength (nm) = 1428.15 Density = 8.93 Iterations = 1 -> Thin Film Approx = XPT<0.1 <- XPT for NI K = 0.079 XPT for CU K = 0.065 Change Absorption Parameters? [N]:N Tabulate Element Parameters? [Y] : N Tabulate Mass Abs. Coeff. [Y] : N Tabulate Detector/Microscope Parameters [Y] : N Do you wish to Enter more Data? [N] STOP